Mr. Yosef Avrahamov
Product Marketing Manager at KLA-Tencor Israel
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | April 6, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Semiconductors, Lithography, Optical lithography, Chemistry, Photoresist materials, Scatterometry, Reflectometry, Critical dimension metrology, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Semiconductors, Metrology, Databases, Image processing, Time metrology, High volume manufacturing, Optical alignment, Intelligence systems, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Reticles, Metrology, Optical lithography, Data modeling, Scanners, Immersion lithography, Optical alignment, Semiconducting wafers, Statistical modeling, Overlay metrology

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Lithography, Metrology, Metals, Image segmentation, Scanners, Scanning electron microscopy, Semiconducting wafers, Overlay metrology, Chemical mechanical planarization, Front end of line

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Lithography, Metrology, Data modeling, Etching, Sputter deposition, Metals, Process control, Aluminum, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Reticles, Metrology, Detection and tracking algorithms, Etching, Scanners, Error analysis, Inspection, Scanning electron microscopy, Semiconducting wafers, Overlay metrology

Showing 5 of 6 publications
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