Yosef Avrahamov
Product Marketing Manager at KLA-Tencor Israel
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | April 6, 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Photoresist materials, Semiconducting wafers, Critical dimension metrology, Scatterometry, Semiconductors, Optical lithography, Photoresist processing, Reflectometry, Lithography, Chemistry

PROCEEDINGS ARTICLE | March 24, 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Overlay metrology, Metrology, Semiconducting wafers, Optical alignment, Time metrology, Databases, High volume manufacturing, Semiconductors, Intelligence systems, Image processing

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Overlay metrology, Metrology, Semiconducting wafers, Scanners, Immersion lithography, Statistical modeling, Optical lithography, Data modeling, Optical alignment, Reticles

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Overlay metrology, Metrology, Image segmentation, Front end of line, Semiconducting wafers, Chemical mechanical planarization, Metals, Lithography, Scanning electron microscopy, Scanners

PROCEEDINGS ARTICLE | March 24, 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Aluminum, Overlay metrology, Process control, Etching, Semiconducting wafers, Data modeling, Lithography, Metrology, Sputter deposition, Metals

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Overlay metrology, Semiconducting wafers, Etching, Reticles, Scanning electron microscopy, Error analysis, Metrology, Detection and tracking algorithms, Scanners, Inspection

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top