Dr. Yoshifumi Ueno
at Univ of California San Diego
SPIE Involvement:
Author
Publications (23)

Proceedings Article | 8 April 2011
Proc. SPIE. 7969, Extreme Ultraviolet (EUV) Lithography II
KEYWORDS: Metrology, Laser energy, Ions, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Tin

Proceedings Article | 20 March 2010
Proc. SPIE. 7636, Extreme Ultraviolet (EUV) Lithography
KEYWORDS: Carbon dioxide, Nd:YAG lasers, Carbon dioxide lasers, Extreme ultraviolet, Extreme ultraviolet lithography, Laser beam diagnostics, Pulsed laser operation, Plasma, Tin, Absorption

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Chemical species, Ions, Carbon dioxide lasers, Laser induced fluorescence, Solids, Extreme ultraviolet, Pulsed laser operation, Plasma, Liquids, Tin

Proceedings Article | 18 March 2009
Proc. SPIE. 7271, Alternative Lithographic Technologies
KEYWORDS: Ions, Laser development, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Extreme ultraviolet lithography, Pulsed laser operation, Plasma, Laser systems engineering, Tin

Proceedings Article | 12 May 2008
Proc. SPIE. 7005, High-Power Laser Ablation VII
KEYWORDS: Mirrors, Light sources, Carbon dioxide, Ions, Nd:YAG lasers, Carbon dioxide lasers, Magnetism, Extreme ultraviolet, Plasma, Tin

Showing 5 of 23 publications
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