Prof. Yoshihiko Hirai
at Osaka Prefecture Univ
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 27 March 2018
Proc. SPIE. 10593, Bioinspiration, Biomimetics, and Bioreplication VIII
KEYWORDS: Nanostructures, Multilayers, Optical properties, Glasses, Image processing, Coating, Reflectivity, Solids, Nanoimprint lithography, Anisotropy

Proceedings Article | 10 May 2016
Proc. SPIE. 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology
KEYWORDS: Lithography, Polymethylmethacrylate, Mechanics, Silicon, Computer simulations, Transmission electron microscopy, Finite element methods, Nanoimprint lithography, Neodymium, Photoresist processing

Proceedings Article | 28 July 2014
Proc. SPIE. 9256, Photomask and Next-Generation Lithography Mask Technology XXI
KEYWORDS: Lithography, Numerical simulations, Collimation, Transmittance, Photomasks, Geometrical optics, Binary data, Light wave propagation, Resolution enhancement technologies, Phase shifts

Proceedings Article | 31 March 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Lithography, Optical lithography, Collimation, Transmittance, Photomasks, Geometrical optics, Binary data, Light wave propagation, Resolution enhancement technologies, Phase shifts

Proceedings Article | 27 May 2009
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Electron beams, Dry etching, Crystals, Silicon, Mask making, Nanoimprint lithography, Motion models, Photomicroscopy, Crystallography, Nanolithography

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Optical lithography, Quartz, Ultraviolet radiation, Molecules, Nickel, Silicon, Silicon films, Polymerization, Positron emission tomography

Showing 5 of 18 publications
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