Dr. Yoshihiko Saito
Marketing at Tokyo Electron Ltd
SPIE Involvement:
Publications (11)

Proceedings Article | 15 February 2018 Presentation + Paper
Proc. SPIE. 10524, Free-Space Laser Communication and Atmospheric Propagation XXX
KEYWORDS: Radio optics, Satellites, Laser development, Telecommunications, Optical communications, Satellite communications, Laser communications, Data communications, Ka band, RF communications

Proceedings Article | 11 May 2009 Paper
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Spatial frequencies, Ions, Fourier transforms, Scanning electron microscopy, Photomasks, Line width roughness, Critical dimension metrology, Line edge roughness, Halftones, Photoresist processing

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Sensors, Metals, Particles, Error analysis, Control systems, Atomic force microscopy, Temperature sensors, Mask making, Polonium, Liquids

Proceedings Article | 23 December 2004 Paper
Proc. SPIE. 5639, Adaptive Optics and Applications III
KEYWORDS: Telescopes, Mirrors, Stars, Wavefront sensors, Wavefronts, Adaptive optics, Control systems, Deformable mirrors, K band, Laser systems engineering

Proceedings Article | 25 October 2004 Paper
Proc. SPIE. 5490, Advancements in Adaptive Optics
KEYWORDS: Ferroelectric materials, Adaptive optics, Deformable mirrors, Finite element methods, Laser optics

Showing 5 of 11 publications
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