Dr. Yoshihiro Midoh
at Osaka Univ
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Mathematical modeling, Signal to noise ratio, Data modeling, Image processing, Scanning electron microscopy, Image quality, Line width roughness, Image enhancement, Line edge roughness

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Metals, Copper, Dielectrics, Reliability, Resistance, Electron beam direct write lithography, Dielectric breakdown

Proceedings Article | 26 March 2013
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Copper, Dielectrics, Reliability, Photomasks, Maskless lithography, Electron beam direct write lithography, Dielectric breakdown

Proceedings Article | 1 April 2010
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Electron beams, Photomasks, Beam shaping, Double patterning technology, Maskless lithography, Computer aided design, Electron beam direct write lithography, Semiconducting wafers, Vestigial sideband modulation

Proceedings Article | 24 March 2008
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Signal to noise ratio, Super resolution, Defect detection, Image processing, Inspection, Scanning electron microscopy, Image filtering, Binary data, Lawrencium, Defect inspection

Proceedings Article | 2 October 2007
Proc. SPIE. 6763, Wavelet Applications in Industrial Processing V
KEYWORDS: Mathematical modeling, Lithography, Edge detection, Metrology, Statistical analysis, Wavelets, Scanning electron microscopy, Line width roughness, Critical dimension metrology, Line edge roughness

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top