Yoshihiro Miyamoto
Technical Sales Manager at ROHM AND HAAS ELECTRONIC MATERIALS K.K.
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Polymers, Diffusion, Materials processing, Manufacturing, Scanning electron microscopy, Integrated circuits, Cadmium sulfide, Semiconducting wafers, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Image processing, Materials processing, Photoresist materials, Thermal effects, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Floods, Resolution enhancement technologies

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