Mr. Yoshihiro Miyamoto Profile

Yoshihiro Miyamoto

Technical Sales Manager at ROHM AND HAAS ELECTRONIC MATERIALS K.K.

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Publications (2)

Proceedings Article | 20 March 2015 Paper

Advanced shrink material for NTD process with lower Y/X shrinkage bias of elongated patterns

Yoshihiro Miyamoto, Takashi Sekito, John Sagan, Yuko Horiba, Takafumi Kinuta, Tatsuro Nagahara, Shinji Tarutani

Proceedings Volume 9425, 942520 (2015) https://doi.org/10.1117/12.2085736

KEYWORDS: Diffusion, Lithography, Polymers, Materials processing, Semiconducting wafers, Resolution enhancement technologies, Manufacturing, Cadmium sulfide, Scanning electron microscopy, Integrated circuits

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Proceedings Article | 27 March 2014 Paper

Chemical shrink materials and process for negative tone development (NTD) resist

Yoshihiro Miyamoto, John Sagan, Munirathna Padmanaban, Georg Pawlowski, Tatsuro Nagahara

Proceedings Volume 9051, 905123 (2014) https://doi.org/10.1117/12.2046311

KEYWORDS: Floods, Photoresist processing, Photoresist materials, Thermal effects, Lithography, Materials processing, Image processing, Semiconducting wafers, Resolution enhancement technologies, Critical dimension metrology

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