Dr. Yoshihiro Taguchi
at Keio Univ
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Amorphous silicon, Microelectromechanical systems, Proteins, Point-of-care devices, Sensors, Sputter deposition, Electrodes, Diffusion, Laser development, Dielectrophoresis, Optical tweezers, Plasma enhanced chemical vapor deposition, Optical manipulation, Light

PROCEEDINGS ARTICLE | February 18, 2010
Proc. SPIE. 7593, Microfluidics, BioMEMS, and Medical Microsystems VIII
KEYWORDS: Microelectromechanical systems, Proteins, Sensors, Electrodes, Glasses, Particles, Diffusion, Dielectrophoresis, Electronic test equipment, Prototyping

PROCEEDINGS ARTICLE | February 17, 2010
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Optical fibers, Sensors, Capillaries, Silicon, Control systems, Signal processing, Optical tracking, Integrated optics, Signal detection, Liquids

PROCEEDINGS ARTICLE | February 8, 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Silica, Sensors, Capillaries, Laser development, Aluminum, Deep reactive ion etching, Detection theory, Semiconducting wafers, Signal detection, Liquids

PROCEEDINGS ARTICLE | January 22, 2007
Proc. SPIE. 6466, MOEMS and Miniaturized Systems VI
KEYWORDS: Microelectromechanical systems, Confocal microscopy, Microscopes, Mirrors, Scanners, Luminescence, Silicon, Reflectivity, Aluminum, Semiconducting wafers

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