Prof. Yoshihiro Todokoro
Professor at Nara Institute of Science and Technology
SPIE Involvement:
Conference Program Committee | Symposium Chair | Author
Publications (9)

PROCEEDINGS ARTICLE | September 1, 1998
Proc. SPIE. 3412, Photomask and X-Ray Mask Technology V
KEYWORDS: Lithography, Electron beam lithography, Reticles, X-ray optics, Optical lithography, X-rays, Manufacturing, Photomasks, Semiconducting wafers, X-ray lithography

PROCEEDINGS ARTICLE | December 8, 1995
Proc. SPIE. 2621, 15th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Lithography, Electron beam lithography, Electronics, Optical lithography, Etching, Error analysis, Printing, Photomasks, Mask making, Photoresist processing

PROCEEDINGS ARTICLE | December 7, 1994
Proc. SPIE. 2322, 14th Annual BACUS Symposium on Photomask Technology and Management
KEYWORDS: Reticles, Lithium, Defect detection, Manufacturing, Inspection, Photomasks, Optical proximity correction, Mask making, Semiconducting wafers, Optics manufacturing

PROCEEDINGS ARTICLE | November 3, 1994
Proc. SPIE. 2254, Photomask and X-Ray Mask Technology
KEYWORDS: Lithography, Reticles, Defect detection, Inspection, Computer programming, Photomasks, Optical proximity correction, Mask making, X-ray technology, Defect inspection

PROCEEDINGS ARTICLE | May 17, 1994
Proc. SPIE. 2197, Optical/Laser Microlithography VII
KEYWORDS: Oxides, Lithography, Etching, Dry etching, Silicon, Reflectivity, Chemical vapor deposition, Aluminum, Excimer lasers, Tin

PROCEEDINGS ARTICLE | August 8, 1993
Proc. SPIE. 1927, Optical/Laser Microlithography
KEYWORDS: Lithography, Optical lithography, Capacitors, Silicon, Capacitance, Very large scale integration, Photomasks, Mask making, Semiconducting wafers, Phase shifts

Showing 5 of 9 publications
Conference Committee Involvement (3)
Photomask and Next-Generation Lithography Mask Technology XI
14 April 2004 | Yokohama, Japan
Photomask and NGL Mask Technology X
16 April 2003 | Yokohama, Japan
Symposium on Photomask and X-Ray Mask Technology
18 April 1996 | Kawasaki City, Japan
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top