Yoshihiro Yamamoto
at Rohm and Haas Electronic Materials KK
SPIE Involvement:
Publications (3)

Proceedings Article | 16 April 2011 Paper
James Cameron, Jin Wuk Sung, Sabrina Wong, Adam Ware, Yoshihiro Yamamoto, Hiroaki Kitaguchi, Libor Vyklicky, Steve Holmes, Irene Popova, Ranee Kwong, Pushkara Rao Varanasi
Proceedings Volume 7972, 797214 (2011) https://doi.org/10.1117/12.881614
KEYWORDS: Lithography, Optical lithography, Control systems, Reflectivity, Coating, Photoresist processing, Antireflective coatings, Etching, Standards development, Bottom antireflective coatings

Proceedings Article | 1 April 2009 Paper
Hung-Chin Huang, Yong-Fa Huang, Steven Wu, Louis Jang, Sho-Shen Lee, George K. Huang, Howard Chen, Chun-Chi Yu, Tomoki Kurihara, Hitoshi Fukiya, Hiromu Yoshida, Yoshihiro Yamamoto
Proceedings Volume 7273, 72730M (2009) https://doi.org/10.1117/12.816136
KEYWORDS: Transmittance, Semiconducting wafers, Lithography, Silicon, Antireflective coatings, Ions, Photoresist processing, Reflectivity, Scanning electron microscopy, Silicon films

Proceedings Article | 1 April 2009 Paper
James Cameron, John Amara, Gregory Prokopowicz, Jin Wuk Sung, David Valeri, Adam Ware, Kevin O'Shea, Yoshihiro Yamamoto, Tomoki Kurihara, Libor Vyklicky, Wu-Song Huang, Irene Popova, Pushkara Rao Varanasi
Proceedings Volume 7273, 72733L (2009) https://doi.org/10.1117/12.814421
KEYWORDS: Lithography, Silicon, Etching, Standards development, Optical lithography, Reflectivity, Polymers, Carbon, Reflection, Photoresist materials

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