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Yoshikazu Arai
at Tohoku Univ
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Author
Publications (4)
Proceedings Article | 16 November 2011 Paper
Design of a linear-rotary micro-stage
Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, Wei Gao
Proceedings Volume 8321, 832121 (2011) https://doi.org/10.1117/12.904884
KEYWORDS: Ferroelectric materials, Sensors, Magnetism, Ultrasonics, Optical fibers, Electromagnetism, Optical testing, Optical engineering, Nanotechnology, Control systems
Proceedings Article | 22 October 2010 Paper
An AFM system with multi-mode scanning for large-area measurement
Yuguo Cui, Gaifa He, Yoshikazu Arai, Wei Gao
Proceedings Volume 7657, 76571N (2010) https://doi.org/10.1117/12.865476
KEYWORDS: Spindles, Atomic force microscopy, 3D scanning, Atomic force microscope, Mechanical engineering, Optical testing, Computer programming, Optics manufacturing, Scanning electron microscopy, Imaging systems
Proceedings Article | 12 January 2009 Paper
Compensation of motion error in a high accuracy AFM
Yuguo Cui, Yoshikazu Arai, Gaofa He, Takemi Asai, Wei Gao
Proceedings Volume 7133, 71334H (2009) https://doi.org/10.1117/12.810123
Proceedings Article | 12 January 2009 Paper
Nanometric edge profile measurement of cutting tools on a diamond turning machine
Proceedings Volume 7133, 713314 (2009) https://doi.org/10.1117/12.807623
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