Yoshimasa Takeichi
EUVP Lab at ASET
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 23, 2006
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Beam splitters, Metrology, Silica, Interferometers, Glasses, Interferometry, Heterodyning, Extreme ultraviolet lithography, Prototyping, Temperature metrology

PROCEEDINGS ARTICLE | May 6, 2005
Proc. SPIE. 5751, Emerging Lithographic Technologies IX
KEYWORDS: Thermography, Metrology, Interferometers, Quartz, Glasses, Interferometry, Heterodyning, Extreme ultraviolet lithography, Phase measurement, Temperature metrology

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