Dr. Yoshinori Matsui
Researcher at Institute of Scientific and Industrial Research Osaka Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Electron beams, Polymers, Ions, Line edge roughness, Chlorine, Scientific research, Photochemistry, Photolysis, Absorption

PROCEEDINGS ARTICLE | May 14, 2004
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Optical components, Lithography, Contamination, Nano opto mechanical systems, Polymers, Spectroscopy, Ions, Mass spectrometry, Scientific research, Carbon monoxide

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Transparency, Contamination, Polymethylmethacrylate, Polymers, Spectroscopy, Ions, Silicon, Hydrogen, Fluorine, Polymer thin films

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