Dr. Yoshinori Nakayama
Senior Researcher at Hitachi Ltd
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 20 April 2011
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Lithography, Diffraction, Multilayers, Polishing, Silica, Calibration, Silicon, Inspection, Surface finishing, Diffraction gratings

SPIE Journal Paper | 1 January 2011
JM3 Vol. 10 Issue 1
KEYWORDS: Calibration, Silicon, Multilayers, Scanning electron microscopy, Diffraction gratings, Electron microscopes, Wet etching, Polishing, Surface finishing, Thin films

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Diffraction, Deep ultraviolet, Calibration, X-rays, Copper, X-ray diffraction, Silicon, Grazing incidence, Laser systems engineering, Diffraction gratings

Proceedings Article | 2 April 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Multilayers, Polishing, Silica, Calibration, Silicon, Scanning electron microscopy, Wet etching, Line edge roughness, Surface finishing, Diffraction gratings

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Diffraction, Silica, Calibration, Silicon, Scanning electron microscopy, Silicon films, Wet etching, Analytical research, Line edge roughness, Diffraction gratings

Showing 5 of 16 publications
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