Mr. Yoshinori Ohsaki Profile

Yoshinori Ohsaki

at Canon Inc

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Author

Publications (3)

Proceedings Article | 1 April 2008 Paper

Optimization procedure of exposure tools with polarization aberrations

Tadashi Arai, Akihiro Yamada, Kenichiro Mori, Yoshinori Osaki, Toshiyuki Yoshihara, Yasuo Hasegawa

Proceedings Volume 6924, 69241I (2008) https://doi.org/10.1117/12.771962

KEYWORDS: Polarization, Projection systems, Birefringence, Jones matrices, Distortion, Metrology, Laser induced plasma spectroscopy, Optical simulations, Wavefront aberrations, Image processing

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Proceedings Article | 26 March 2007 Paper

New projection optics and aberration control system for the 45-nm node

Toshiyuki Yoshihara, Bunsuke Takeshita, Atsushi Shigenobu, Yasuo Hasegawa, Yoshinori Ohsaki, Kazuhiko Mishima, Seiya Miura

Proceedings Volume 6520, 652022 (2007) https://doi.org/10.1117/12.711375

KEYWORDS: Projection systems, Monochromatic aberrations, Wavefront aberrations, Control systems, Sensors, Aberration correction, Optics manufacturing, Metrology, Lithography, Optical properties

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Proceedings Article | 15 March 2006 Paper

A new on-machine measurement system to measure wavefront aberrations of projection optics with hyper-NA

Y. Ohsaki, T. Mori, S. Koga, M. Ando, K. Yamamoto, T. Tezuka, Y. Shiode

Proceedings Volume 6154, 615424 (2006) https://doi.org/10.1117/12.657865

KEYWORDS: Projection systems, Wavefront aberrations, Fiber optic illuminators, Semiconducting wafers, Interferometers, Spatial coherence, Charge-coupled devices, Reticles, Light sources, Diffraction

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