Dr. Yoshitaro Sakata
at AIST
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 4 March 2019
Proc. SPIE. 10925, Photonic Instrumentation Engineering VI
KEYWORDS: Refractive index, Polishing, Glasses, Particles, Light scattering, Manufacturing, Inspection, CCD cameras, Surface finishing, Temperature metrology

Proceedings Article | 15 March 2016
Proc. SPIE. 9754, Photonic Instrumentation Engineering III
KEYWORDS: Refractive index, Polishing, Polarization, Reflection, Glasses, Particles, Light scattering, Manufacturing, Inspection, CCD cameras, Liquid crystals, Chemical analysis, Surface finishing, Chemical mechanical planarization

Proceedings Article | 1 May 2014
Proc. SPIE. 9132, Optical Micro- and Nanometrology V
KEYWORDS: Actuators, Refractive index, Polishing, Glasses, Particles, Light scattering, Inspection, CCD cameras, Surface finishing, Chemical mechanical planarization

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