Mr. Yosias Melaku Profile

Yosias Melaku

at Lam Research Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 14 June 1996 Paper

TSI process performance in a transformer-coupled plasma dry develop tool

Yosias Melaku, Siddhartha Das, John Hutchinson, Wendy Nguyen

Proceedings Volume 2724, (1996) https://doi.org/10.1117/12.241838

KEYWORDS: Etching, Plasma, Semiconducting wafers, Oxygen, Photoresist processing, Plasma etching, Interferometers, Photomasks, Ions, Scanning electron microscopy

Read Abstract +

Proceedings Article | 16 April 1993 Paper

Transformer-coupled plasma technology for sub-half-micron etching

Brendan Richardson, Huong Nguyen, E. Bogle, Wai-Man Li, John Holland, Duane Gates, Yosias Melaku, Eric Peltzer

Proceedings Volume 1803, (1993) https://doi.org/10.1117/12.142919

KEYWORDS: Information operations, Plasma, Etching, Adaptive optics, Radon, Ions, Chlorine, Molybdenum, Selenium, Silicon

Read Abstract +

Proceedings Article | 1 March 1991 Paper

Dry etching for silylated resist development

Luc Van den Hove, Philippe Laporte, Yosias Melaku

Proceedings Volume 1392, (1991) https://doi.org/10.1117/12.48914

KEYWORDS: Etching, Semiconducting wafers, Plasma, Oxygen, Critical dimension metrology, Photoresist processing, Dry etching, Integrated circuits, Magnetism, Electrodes

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years