CONFERENCE PROCEEDINGS
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Youbao Zhang
at Shanghai Institute of Optics and fine Mechanics
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 10 February 2017
Design and implementation of a cloud based lithography illumination pupil processing application
Proc. SPIE. 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016)
KEYWORDS: Lithographic illumination, Clouds, Lithography
Proceedings Article | 5 August 2015
Accurate measurement of illumination uniformity using spot sensor based 2-dimension scanning method
Proc. SPIE. 9621, 2015 International Conference on Optical Instruments and Technology: Advanced Lasers and Applications
KEYWORDS: Sensors, Lithographic illumination, Fiber optic illuminators, Excimer lasers, Lithography, Deep ultraviolet, Laser applications, Pulsed laser operation, CCD cameras, Critical dimension metrology
Proceedings Article | 28 January 2009
Scattering performance analysis of reflectance photometer for quantifying gold labeled test strips
Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments
KEYWORDS: Particles, Gold, Scattering, Photometry, Reflectivity, Light scattering, Absorption, Scanning electron microscopy, Mie scattering, Transmittance
Proceedings Article | 28 January 2009
Improvement of up-converting phosphor technology-based biosensor
Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments
KEYWORDS: Biosensors, Signal processing, Signal detection, Control systems, Particles, Particle filters, Interfaces, Image filtering, Phosphorescence, Control systems design
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