Mr. Youbao Zhang Profile

Youbao Zhang

at Shanghai Institute of Optics and fine Mechanics

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Author

Publications (5)

SPIE Journal Paper | 18 March 2020

Telecentricity measurement for exposure system of photolithography tools

Youbao Zhang, Xiaozhe Ma, Fang Zhang, Huijie Huang

OE Vol. 59 Issue 03

KEYWORDS: Semiconducting wafers, Optical lithography, Lithography, Photoresist materials, Optical engineering, Photomasks, Fiber optic illuminators, Sensors, Lithographic illumination, Overlay metrology

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Proceedings Article | 10 February 2017 Paper

Design and implementation of a cloud based lithography illumination pupil processing application

Youbao Zhang, Xinghua Ma, Jing Zhu, Fang Zhang, Huijie Huang

Proc. SPIE. 10250, International Conference on Optical and Photonics Engineering (icOPEN 2016)

KEYWORDS: Lithography, Lithographic illumination, Clouds

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Proceedings Article | 5 August 2015 Paper

Accurate measurement of illumination uniformity using spot sensor based 2-dimension scanning method

Chengke Xie, Ming Chen, Youbao Zhang, Xinghua Ma, Baoxi Yang, Huijie Huang

Proc. SPIE. 9621, 2015 International Conference on Optical Instruments and Technology: Advanced Lasers and Applications

KEYWORDS: Lithography, Lithographic illumination, Deep ultraviolet, Sensors, Laser applications, CCD cameras, Excimer lasers, Critical dimension metrology, Pulsed laser operation, Fiber optic illuminators

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Proceedings Article | 28 January 2009 Paper

Scattering performance analysis of reflectance photometer for quantifying gold labeled test strips

Lihua Huang, Youbao Zhang, Chengke Xie, Jianfeng Qu, Huijie Huang, Xiangzhao Wang

Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments

KEYWORDS: Gold, Scattering, Particles, Light scattering, Reflectivity, Scanning electron microscopy, Transmittance, Mie scattering, Photometry, Absorption

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Proceedings Article | 28 January 2009 Paper

Improvement of up-converting phosphor technology-based biosensor

Chengke Xie, Lihua Huang, Youbao Zhang, Xiaoxian Guo, Jianfeng Qu, Huijie Huang

Proc. SPIE. 7156, 2008 International Conference on Optical Instruments and Technology: Optical Systems and Optoelectronic Instruments

KEYWORDS: Particles, Interfaces, Biosensors, Control systems, Phosphorescence, Signal processing, Particle filters, Image filtering, Signal detection, Control systems design

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