Dr. Youichi Bitou
at National Metrology Institute of Japan
SPIE Involvement:
Publications (13)

Proceedings Article | 21 August 2020 Presentation + Paper
Proceedings Volume 11492, 1149203 (2020) https://doi.org/10.1117/12.2570412
KEYWORDS: Autocollimators, Fizeau interferometers, Optical testing, 3D scanning, 3D metrology, Deflectometry, Calibration, Metrology, Interferometers

Proceedings Article | 25 October 2016 Paper
Y. Kondo, Y. Bitou, Kazuhide Yamauchi
Proceedings Volume 9687, 968708 (2016) https://doi.org/10.1117/12.2242806
KEYWORDS: Fizeau interferometers, Finite element methods, Photography, Silicon, Measurement devices, Semiconducting wafers, Photomasks, Adhesives, Metrology, Geometrical optics

Proceedings Article | 3 November 2011 Paper
Kenichi Hibino, Yangjin Kim, Youichi Bitou, Mamoru Mitsuishi
Proceedings Volume 8011, 80110B (2011) https://doi.org/10.1117/12.901637
KEYWORDS: Refractive index, Optical testing, Wavelength tuning, Phase measurement, Interferometers, Interferometry, Silica, Glasses, Beam splitters, Wafer-level optics

Proceedings Article | 11 August 2008 Paper
Kenichi Hibino, Kim Yangjin, Youichi Bitou, Sonko Ohsawa, Naohiko Sugita, Mamoru Mitsuishi
Proceedings Volume 7063, 70630S (2008) https://doi.org/10.1117/12.797594
KEYWORDS: Refractive index, Interferometry, Optical testing, Phase measurement, Glasses, Wavelength tuning, Fizeau interferometers, Interferometers, Beam splitters, Ferroelectric materials

Proceedings Article | 14 August 2006 Paper
Proceedings Volume 6292, 62920Q (2006) https://doi.org/10.1117/12.679314
KEYWORDS: Interferometry, Ferroelectric materials, Phase shifts, Wavelength tuning, Phase measurement, Phase interferometry, Fizeau interferometers, Beam splitters, Profiling, Silica

Showing 5 of 13 publications
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