Dr. Youichi Bitou
at National Metrology Institute of Japan
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 25 October 2016
Proc. SPIE. 9687, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subnanometer Accuracy Measurement for Synchrotron Optics and X-Ray Optics
KEYWORDS: Metrology, Silicon, Photography, Finite element methods, Measurement devices, Photomasks, Geometrical optics, Semiconducting wafers, Adhesives, Fizeau interferometers

Proceedings Article | 3 November 2011
Proc. SPIE. 8011, 22nd Congress of the International Commission for Optics: Light for the Development of the World
KEYWORDS: Wafer-level optics, Refractive index, Beam splitters, Silica, Interferometers, Glasses, Interferometry, Optical testing, Wavelength tuning, Phase measurement

Proceedings Article | 11 August 2008
Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis
KEYWORDS: Refractive index, Beam splitters, Ferroelectric materials, Interferometers, Glasses, Interferometry, Optical testing, Wavelength tuning, Phase measurement, Fizeau interferometers

Proceedings Article | 14 August 2006
Proc. SPIE. 6292, Interferometry XIII: Techniques and Analysis
KEYWORDS: Beam splitters, Ferroelectric materials, Silica, Interferometry, Phase interferometry, Profiling, Wavelength tuning, Phase measurement, Phase shifts, Fizeau interferometers

Proceedings Article | 18 August 2005
Proc. SPIE. 5879, Recent Developments in Traceable Dimensional Measurements III
KEYWORDS: Mirrors, Fabry–Perot interferometers, Ferroelectric materials, Modulation, Interferometers, Interferometry, Phase interferometry, Semiconductor lasers, Phase measurement, Phase shifts

Showing 5 of 12 publications
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