Yoichi Minami
President at Litho Tech Japan Corp Ltd
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 3 October 2018 Presentation + Paper
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Oxides, Contamination, Nanoparticles, Metals, Particles, Mass spectrometry, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Oxides, Imaging systems, Nanoparticles, Polymers, Metals, Ions, Mass spectrometry, Extreme ultraviolet lithography, Analytical research, Semiconducting wafers, Zirconium dioxide

Proceedings Article | 12 April 2007 Paper
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Multilayers, Light sources, Imaging systems, Scanners, Manufacturing, Extreme ultraviolet lithography, Photoresist processing, Semiconducting wafers, Floods

Proceedings Article | 15 March 2007 Paper
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Mirrors, Light sources, Contamination, Electrodes, Metals, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography, Floods, Plasma

Proceedings Article | 4 May 2005 Paper
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Semiconductors, Lithography, Monochromatic aberrations, Optical lithography, Sensors, Quartz, Immersion lithography, Semiconducting wafers, 193nm lithography, Liquids

Showing 5 of 7 publications
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