Ms. Young-Hwa Noh Profile

Young-Hwa Noh

at SAMSUG Electronics Co Ltd

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Publications (3)

Proceedings Article | 9 September 2013 Paper

Mask automation: need a revolution in mask makers and equipment industry

Seong-yong Moon, Sang-yong Yu, Young-hwa Noh, Ki-jung Son, Hyun-Joo Lee, Han-Ku Cho

Proc. SPIE. 8880, Photomask Technology 2013

KEYWORDS: Semiconductors, Manufacturing, Control systems, Telecommunications, Process control, Photomasks, Extreme ultraviolet, Mask making, Semiconducting wafers, Wafer manufacturing

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Proceedings Article | 20 October 2006 Paper

Required mask specification for mass production devices below 65-nm design node

Dongseok Nam, Soohan Choi, Jonggul Doh, Young-hwa Noh, Hojune Lee, Yu-jeung Sin, Bo-hye Kim, Man-kyu Kang, Byunggook Kim, Seong-woon Choi, Woosung Han

Proc. SPIE. 6349, Photomask Technology 2006

KEYWORDS: Semiconductors, Manufacturing, Computer simulations, Photomasks, Optical proximity correction, Mask making, Critical dimension metrology, Photoresist processing, Semiconducting wafers, Tolerancing

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Proceedings Article | 20 May 2006 Paper

Reduction of MDP time through the improvement of verification method

Young-Hwa Noh, Sung-Hoon Jang, Won-Tai Ki, Ji-Hyeon Choi, Seong-Woon Choi, Woo-Sung Han

Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII

KEYWORDS: Semiconductors, Lithography, Electronics, Photomasks, Computed tomography, Double patterning technology, Critical dimension metrology, Data conversion, Data centers, Resolution enhancement technologies

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