Dr. Young-Seok Woo
Senior Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Finite-difference time-domain method, Lithographic illumination, Cadmium, Reflection, Image processing, Silicon, 3D modeling, Printing, Solids, Process control, Field effect transistors, Computational lithography, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Anisotropy

Proceedings Article | 4 March 2010
Proc. SPIE. 7640, Optical Microlithography XXIII
KEYWORDS: Lithography, Optical lithography, Lithographic illumination, Computer simulations, Bridges, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Tolerancing, Resolution enhancement technologies

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