Dr. Young-Sik Ghim
at Korea Research Institute of Standards and Science
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Thermography, Optical components, Lithography, Diffractive optical elements, Manufacturing, Laser ablation, Photomasks, Optics manufacturing, Polonium

PROCEEDINGS ARTICLE | October 16, 2012
Proc. SPIE. 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Mirrors, Polishing, Polishing equipment, Interferometers, Calibration, Optical fabrication, Heterodyning, Optical encoders, Aspheric optics, Finite element methods

PROCEEDINGS ARTICLE | October 16, 2012
Proc. SPIE. 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Polishing, Polyurethane, Chemical species, Sputter deposition, Ions, Surface roughness, Ion beams, Optical simulations, Ion beam finishing, Surface finishing

PROCEEDINGS ARTICLE | September 13, 2012
Proc. SPIE. 8493, Interferometry XVI: Techniques and Analysis
KEYWORDS: Confocal microscopy, Microscopes, Metrology, Optical spheres, Interferometers, Calibration, Error analysis, Interferometry, Profilometers, Spherical lenses

PROCEEDINGS ARTICLE | September 14, 2011
Proc. SPIE. 8133, Dimensional Optical Metrology and Inspection for Practical Applications
KEYWORDS: Wafer-level optics, Refractive index, Interferometers, Error analysis, Silicon, Reflectivity, Interferometry, Reflectometry, Charge-coupled devices, Semiconducting wafers

PROCEEDINGS ARTICLE | August 11, 2008
Proc. SPIE. 7063, Interferometry XIV: Techniques and Analysis
KEYWORDS: Thin films, Optical filters, Metrology, Data modeling, Polarization, Interfaces, Reflectivity, Reflectometry, Objectives, Light

Showing 5 of 11 publications
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