Dr. Younghoon Sohn
Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Data modeling, Scanning electron microscopy, Time metrology, Spectroscopic ellipsometry, Scanning probe microscopy, Critical dimension metrology, Semiconducting wafers, Spectroscopes, Phase shifts

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Lithography, Metrology, Statistical analysis, Data modeling, Sensors, Coating, Data processing, Wafer inspection, Analytical research, Algorithm development, Semiconducting wafers, Failure analysis

PROCEEDINGS ARTICLE | May 9, 2005
Proc. SPIE. 5768, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems IV
KEYWORDS: Laser sources, Scattering, Ultrasonography, Silicon, Laser scattering, Receivers, Ultrasonics, Near field, Reactive ion etching, Laser sintering

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