Dr. Younghoon Sohn
Principal Engineer at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Critical dimension metrology, Phase shifts, Semiconductors, Spectroscopic ellipsometry, Scanning probe microscopy, Semiconducting wafers, Data modeling, Spectroscopes, Time metrology, Scanning electron microscopy

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Data processing, Semiconductors, Failure analysis, Semiconducting wafers, Analytical research, Statistical analysis, Lithography, Wafer inspection, Data modeling, Algorithm development, Coating, Sensors

Proceedings Article | 9 May 2005
Proc. SPIE. 5768, Health Monitoring and Smart Nondestructive Evaluation of Structural and Biological Systems IV
KEYWORDS: Ultrasonography, Near field, Receivers, Laser sintering, Silicon, Ultrasonics, Laser sources, Laser scattering, Scattering, Reactive ion etching

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top