Youngmin Kim
Assistant Professor at Ulsan National Institute of Science and Technology
SPIE Involvement:
Author
Area of Expertise:
DFM , lithography , circuit design , variations , CMP , TCAD
Publications (3)

Proceedings Article | 1 April 2008 Paper
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Transistors, Ions, Capacitance, TCAD, Mathematical modeling, Manufacturing, Optimization (mathematics), Standards development, Diffusion, Oxides

Proceedings Article | 14 March 2006 Paper
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: TCAD, Instrument modeling, Ions, Data modeling, Line edge roughness, Silicon, Transistors, Device simulation, 3D modeling, Lithography

Proceedings Article | 14 March 2006 Paper
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Critical dimension metrology, Scattering, Lithography, SRAF, Optical proximity correction, Computer programming, Manufacturing, Resolution enhancement technologies, Optimization (mathematics), Binary data

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