Youngmin Kim
Assistant Professor at Ulsan National Institute of Science and Technology
SPIE Involvement:
Author
Area of Expertise:
DFM , lithography , circuit design , variations , CMP , TCAD
Publications (3)

Proceedings Article | 1 April 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Mathematical modeling, Oxides, Ions, Diffusion, Manufacturing, Capacitance, Transistors, Optimization (mathematics), TCAD, Standards development

Proceedings Article | 14 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Data modeling, Ions, Silicon, 3D modeling, Transistors, Line edge roughness, TCAD, Device simulation, Instrument modeling

Proceedings Article | 14 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Scattering, Manufacturing, Computer programming, Optical proximity correction, SRAF, Critical dimension metrology, Optimization (mathematics), Binary data, Resolution enhancement technologies

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