Prof. Youngsoo Shin
at KAIST
SPIE Involvement:
Author
Publications (25)

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12495, 124951Z (2023) https://doi.org/10.1117/12.2658307
KEYWORDS: Lithography, Simulations, Semiconducting wafers, Wafer-level optics, Calibration, Printing, Convolution, Linear regression, Convolutional neural networks, Computational lithography

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12495, 1249524 (2023) https://doi.org/10.1117/12.2658484
KEYWORDS: Optical proximity correction, Lithography, Semiconducting wafers, Feature extraction, Bias correction, Adaptive control

Proceedings Article | 26 May 2022 Presentation + Paper
Yonghwi Kwon, Youngsoo Shin
Proceedings Volume 12052, 120520Y (2022) https://doi.org/10.1117/12.2614391
KEYWORDS: Optical proximity correction, Artificial neural networks, Lithography, Computer simulations

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520M (2022) https://doi.org/10.1117/12.2614346
KEYWORDS: Convolution, Lithography, Deconvolution, Systems modeling, Photomasks, Machine learning, Image restoration, Distance measurement

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520S (2022) https://doi.org/10.1117/12.2614339
KEYWORDS: Optical proximity correction, Photomasks, Machine learning, Lithography, Convolution, Principal component analysis, Feature extraction

Showing 5 of 25 publications
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