Prof. Youngsoo Shin
at KAIST
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical properties, Fourier transforms, Neural networks, Photomasks, Machine learning, Optical proximity correction, Neurons

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Electronics, Logic, Clocks, Metals, Legal, LCDs, Electrical engineering, Multiplexers, Circuit switching, Standards development

Proceedings Article | 20 March 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Lithography, Clocks, Etching, Metals, Copper, Resistance, Signal processing, Photomasks, Double patterning technology, Chemical mechanical planarization

Proceedings Article | 30 March 2017
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Data modeling, Etching, Metals, Image processing, Resistance, Computer simulations, 3D modeling, Artificial neural networks, Machine learning, Photoresist processing, Standards development, 3D image processing

Proceedings Article | 28 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Etching, Metals, Dielectrics, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Immersion lithography, Source mask optimization, Optical proximity correction, Line edge roughness

Proceedings Article | 28 March 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Optical lithography, Etching, Metals, Manufacturing, Reliability, 3D modeling, Signal processing, Photomasks, Double patterning technology, Source mask optimization, Electrical engineering

Showing 5 of 16 publications
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