Dr. Youssef Drissi
at imec
SPIE Involvement:
Publications (14)

Proceedings Article | 10 April 2024 Presentation + Paper
Hsinlan Chang, Youssef Drissi, Gioele Mirabelli, Odysseas Zografos, Yasser Sherazi, Julien Ryckaert, Gaspard Hiblot
Proceedings Volume 12953, 129530Y (2024) https://doi.org/10.1117/12.3010804
KEYWORDS: Extreme ultraviolet, Printing, Optical lithography, Extreme ultraviolet lithography, Metals, Transistors, Optical proximity correction, Deep ultraviolet

Proceedings Article | 22 November 2023 Presentation
Proceedings Volume PC12751, PC127510Q (2023) https://doi.org/10.1117/12.2687822
KEYWORDS: Optical proximity correction, Photomasks, Extreme ultraviolet, Calibration, Semiconducting wafers, Scanning electron microscopy, Printing, Modeling, Machine learning, Data modeling

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12052, 120520F (2022) https://doi.org/10.1117/12.2615311
KEYWORDS: Metals, Fin field effect transistors, Semiconducting wafers, Optical lithography, 3D imaging standards, Integrated circuits, CMOS devices, Standards development, Field effect transistors, Etching

Proceedings Article | 5 March 2022 Presentation + Paper
Youssef Drissi, Werner Gillijns, Sebastien Lardenois, Peter Verheyen, Guy Lepage, Mahmoud Mohsen, Maxence Delorme
Proceedings Volume 12012, 1201208 (2022) https://doi.org/10.1117/12.2609092
KEYWORDS: Optical proximity correction, Scanning electron microscopy, Semiconducting wafers, Silicon photonics, Photomasks, Metrology, Manufacturing, Silicon, Etching, Resolution enhancement technologies

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11614, 116140Q (2021) https://doi.org/10.1117/12.2584730
KEYWORDS: Optical proximity correction, Semiconducting wafers, Metals, Extreme ultraviolet, SRAF, Lithography

Showing 5 of 14 publications
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