Dr. Youssry Y. Botros
at Intel Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Process control, Data modeling, Standards development, Semiconducting wafers, Error analysis, Statistical analysis, Control systems, Optical lithography, Data analysis, Nanotechnology

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Process control, Data modeling, Control systems, Semiconducting wafers, Standards development, Computer architecture, System integration, Manufacturing, Statistical analysis, Databases

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