Dr. Youssry Y. Botros
at Intel Corp
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 29, 2004
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Nanotechnology, Optical lithography, Statistical analysis, Data modeling, Error analysis, Control systems, Process control, Semiconducting wafers, Standards development, Data analysis

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Statistical analysis, Data modeling, Databases, Manufacturing, Control systems, Process control, System integration, Semiconducting wafers, Computer architecture, Standards development

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