Yu-Jin Pyo
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 April 2011
Proc. SPIE. 7974, Design for Manufacturability through Design-Process Integration V
KEYWORDS: Lithography, Optical lithography, Error analysis, Resistance, Monte Carlo methods, Capacitance, Photomasks, Transistors, Critical dimension metrology, Overlay metrology

Proceedings Article | 13 March 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Surface plasmons, Optical lithography, Statistical analysis, Error analysis, Manufacturing, Resistance, Monte Carlo methods, Process control, Critical dimension metrology, Overlay metrology

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