Mr. Yu-Sheng Yang
at National Tsing Hua Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5717, MEMS/MOEMS Components and Their Applications II
KEYWORDS: Actuators, Oxides, Lithography, Diffraction, Optical design, Etching, Reflectivity, Photomasks, Aluminum, Diffraction gratings

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