In this paper, we presented a high performance monolithic Si DWDM receiver comprising a 1×32 Si-based AWG filter
and a high speed waveguided Ge-on-Si photodetectors array on silicon-on-insulator platform. The Si-based AWG has
200 GHz channel spacing and its optical adjacent crosstalk performance is more than 18 dB. Each Ge-on-Si
photodetector has 10 GHz bandwidth; and can transmit at least 10 Gbps data rate. So, the aggregated data rate of the
DWDM receiver is at least 320 GHz. At a BER of 1 × 10-11, the DWDM receiver showed an optical input sensitivity
between -16 dBm and -19 dBm for all 32 channels in Lband. This first demonstration indicates the feasibility and
potential of manufacturing low cost silicon DWDM receivers for terabit data communications. The size of entire receiver
is 1.5×1.0 mm2.