Yu Ben
at GlobalFoundries
SPIE Involvement:
Publications (5)

Proceedings Article | 30 June 2012 Paper
Proceedings Volume 8441, 84410U (2012) https://doi.org/10.1117/12.965565
KEYWORDS: Source mask optimization, Molybdenum, Optical proximity correction, Electroluminescence, Resolution enhancement technologies, Tolerancing, Critical dimension metrology, Semiconducting wafers, Data modeling, Calibration

Proceedings Article | 4 April 2011 Paper
Proceedings Volume 7974, 79740P (2011) https://doi.org/10.1117/12.878725
KEYWORDS: Probability theory, Monte Carlo methods, Failure analysis, Matrices, Solids, Statistical analysis, Computer simulations, Transistors, Principal component analysis, Visualization

Proceedings Article | 4 March 2008 Paper
Proceedings Volume 6925, 69251B (2008) https://doi.org/10.1117/12.772785
KEYWORDS: Scatterometry, Optical design, Pellicles, Lithography, Metrology, Binary data, Spatial frequencies, Composites, Phase shifts, Optical simulations

Proceedings Article | 1 November 2007 Paper
Proceedings Volume 6730, 67304S (2007) https://doi.org/10.1117/12.746833
KEYWORDS: Scatterometry, Calibration, Critical dimension metrology, Data modeling, Scatter measurement, Semiconducting wafers, Metrology, Phase shifts, Finite element methods, Panoramic photography

Proceedings Article | 31 January 2005 Paper
Yu Ben, Zhi-Biao Hao, Changzheng Sun, Fan Ren, Ning Tan, Yi Luo
Proceedings Volume 5624, (2005) https://doi.org/10.1117/12.573472
KEYWORDS: Photonic crystals, Quantum information, Light sources, Quantum dots, Gallium arsenide, Dielectrics, Reflectors, Excitons, Single photon, Finite-difference time-domain method

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