Dr. Yu Cao
at Arizona State Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 13, 2009
Proc. SPIE. 7275, Design for Manufacturability through Design-Process Integration III
KEYWORDS: Oxides, Data modeling, Annealing, Silicon, Diffusion, Reflectivity, Doping, Transistors, TCAD, Thermal modeling

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