Nanometrological AFM with high-resolution interferometers can be used for a wide-ranged measurements and be
traceable to the unit of length, but such problems as reduction of measuring uncertainty, correction of complex
nonlinearity error and advancing of repeatability restrict the application of MAFM. This paper presents the design of
metrological AFM based on double F-P interferometer in XYZ directions, which consists of one He-Ne laser, one '1 x 3'
fiber splitter and four self-focused lens instead of three sets of He-Ne laser. This design can not only avoid the traceable
error caused by different optical sources in three directions, but also improve the resolution of the measurement through
the transfer of nano-dimension to a pair of fundamental frequency pulse interval, while external noise and disturbance
caused by outside environment are dramatically eliminated using double F-P interferometers of the same cavity length
and material. Nano-dimensional measurement and stability test have been successfully accomplished with double F-P
system in X or Z direction with measurement sensitivity of &lgr;/2000nm , which meets the requirement of nanometrology.
C-band and S-band fiber Raman gain spectrum pumped by single wavelength high power fiber Raman laser were tested and the proper chirped Bragg fiber grating as gain flattening filter was designed to flatten actually tested gain spectrum. Besides, FWDM (filter wavelength division multiplexer) and 1427nm/1505nm CWDM (coarse wavelength division multiplexer) are used as C-band and S-band fiber Raman amplifier pump-signal couplers respectively. The gain media are 50 km G652 fiber and 5km DCF (dispersion compensation fiber). C-band fiber dispersion compensation Raman amplifier with bandwidth from 1519nm to 1574nm (55nm) and average gain 15.2dB and ripple ±0.8dB was successfully obtained. S-band fiber dispersion compensation Raman amplifier with bandwidth from 1488nm to 1541nm (53nm) and average gain 10.1dB and ripple ±0.9dB was successfully obtained. During the test of C-band fiber Raman amplifiers, broadband ASE light source and WDM-emulator were used to simulate the DWDM (dense wavelength division multiplexing) signal source that can make the whole test more accurate. It is very significant for extending range of communication band of fiber and increasing the capacity of fiber communication especially for ultra-long haul and ultra-high capacity communication system. At last, the result of experiment using these setup and influence caused by gain flattening filter and different type fibers location arrangements (G652 fiber and DCF) and corresponding solutions were also discussed.
The development of micro-electronic has been entering the era of nano in advance, consequently, the measurement, metrology, trace and instrument calibration on nano scope must be up to the determined accuracy. Apart aside the traditional methods such as the aid of standard samples, the self-calibration of instrument is based on the 3D laser interference system with stabilized laser applied to SPM, which can also make the measurement result traceable to the primary standard of length unit directly. However, the complexity of instrument and the characteristic of sample make the elimination of error sources more difficult, so it is not enough to correct resolution just with methods above. The paper will introduce the statement and development of nanometrology and force on some original calibration methods.
A new electron beam source based on a pseudospark discharge was developed. The electron beam has high brightness of about 3 X 1011 A/(m rad)2 and can be used for compact free electron lasers. New experiment result is reported, a beam energy of 230 keV, a current of 7 kA and an emittance of 48 mm mrad are obtained.
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