Mr. Yuan Hsu Profile

Yuan Hsu

at Photronics DNP Mask Corp

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Author

Publications (3)

Proceedings Article | 27 June 2019 Paper

A study of airborne molecular contamination to Cr etching process

Yuan Hsu, Yutaka Satou, Heng-Jen Lee, Zack Huang

Proc. SPIE. 11178, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology

KEYWORDS: Contamination, Chromium, Etching, Chlorine, Plasma, Particles, Inspection, Photomasks, Dry etching, Scanning electron microscopy

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Proceedings Article | 12 June 2018 Paper

Advanced ceramic protective lifetime prolong for particle control

Yuan Hsu, Yutaka Satou

Proc. SPIE. 10807, Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology

KEYWORDS: Coating, Plasma, Plasma treatment, Chlorine, Sputter deposition, Particles, Fluorine, Ceramics, Carbon, X-rays

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Proceedings Article | 13 July 2017 Paper

Mask crosstalk defect between develop to etch process

Yuan Hsu, Hong-Jen Lee

Proc. SPIE. 10454, Photomask Japan 2017: XXIV Symposium on Photomask and Next-Generation Lithography Mask Technology

KEYWORDS: Etching, Dry etching, Particles, Photomasks, Inspection, Defect inspection, Chromium, Photoresist developing, Reactive ion etching, Defect detection

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