Thin film growth on plane structure surface was discussed by mostly articles, but thin film growth on the
microstructure surface like sub-wave grating was little reported. The growth of 100 nm Au film on the surface of
sub-wave grating with sine groove shape and 80 nm groove depth was investigated in this article. It was shown by
experiments that the thin film growth was the profiling grow, the grating sine grooved characteristic and periodic
were almost unchanged, but after coating, some phenomena like the increasing of sine duty factor, the worse
uniformity of grating groove depth and the decreasing of groove depth were shown by experiments. The theory of
thin film growth shadow effect which is brought by the grating microstructure was proposed to carry on the
theoretical analysis in this article. The judging method of film dispersion pattern was also brought up, which was
based on the thickness of thin film and the groove depth of grating before coating. When the thickness of thin film
was lower than the groove depth, film dispersion pattern was defined as "A" model. The opposite was defined as
"B" model.
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