Mr. Ming-Quan Yuan Profile

Ming-Quan Yuan

at Institute of Electronic Engineering

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Proceedings Article | 20 February 2018 Paper

The MEMS process of a micro friction sensor

Ming-Quan Yuan, Qiang Lei, Xiong Wang

Proceedings Volume 10697, 106970J (2018) https://doi.org/10.1117/12.2306820

KEYWORDS: Sensors, Silicon, Microelectromechanical systems, Skin, Corrosion, Glasses, Capacitance, Etching, Chemical elements, Deep reactive ion etching

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The research and testing techniques of friction sensor is an important support for hypersonic aircraft. Compared with the conventional skin friction sensor, the MEMS skin friction sensor has the advantages of small size, high sensitivity, good stability and dynamic response. The MEMS skin friction sensor can be integrated with other flow field sensors whose process is compatible with MEMS skin friction sensor to achieve multi-physical measurement of the flow field; and the micro-friction balance sensor array enable to achieve large area and accurate measurement for the near-wall flow. A MEMS skin friction sensor structure is proposed, which sensing element not directly contacted with the flow field. The MEMS fabrication process of the sensing element is described in detail. The thermal silicon oxide is used as the mask to solve the selection ratio problem of silicon DRIE. The optimized process parameters of silicon DRIE: etching power 1600W/LF power 100 W; SF₆ flux 360 sccm; C₄F₈ flux 300 sccm; O₂ flux 300 sccm. With Cr/Au mask, etch depth of glass shallow groove can be controlled in 30°C low concentration HF solution; the spray etch and wafer rotate improve the corrosion surface quality of glass shallow groove. The MEMS skin friction sensor samples were fabricated by the above MEMS process, and results show that the error of the length and width of the elastic cantilever is within 2 μm, the depth error of the shallow groove is less than 0.03 μm, and the static capacitance error is within 0.2 pF, which satisfy the design requirements.

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