Dr. Yuan Xu
Senior Research Fellow at Institute of Materials Research and Engineering
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Oxides, Ferroelectric materials, Electrodes, Metals, Ceramics, Dielectrics, Silicon, Laser scanners, Silicon films, Bismuth

PROCEEDINGS ARTICLE | November 14, 2002
Proc. SPIE. 4937, Biomedical Applications of Micro- and Nanoengineering
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Satellites, Glasses, Particles, Silicon, Photoresist materials, Semiconducting wafers, Liquids

PROCEEDINGS ARTICLE | November 13, 2002
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Skin, Copper, Silicon, Scanning electron microscopy, Chemical analysis, Microfabrication, Electroplating

PROCEEDINGS ARTICLE | September 28, 2001
Proc. SPIE. 4560, Microfluidics and BioMEMS
KEYWORDS: Actuators, Ferroelectric materials, Glasses, Silicon, 3D modeling, Head, Modal analysis, Finite element methods, Epoxies, Semiconducting wafers

PROCEEDINGS ARTICLE | September 28, 2001
Proc. SPIE. 4560, Microfluidics and BioMEMS
KEYWORDS: Actuators, Ferroelectric materials, Microfluidics, Data modeling, Glasses, Silicon, 3D modeling, Quantitative analysis, Head, Finite element methods

PROCEEDINGS ARTICLE | September 28, 2001
Proc. SPIE. 4560, Microfluidics and BioMEMS
KEYWORDS: Actuators, Microfluidics, Electrodes, Gases, Hydrogen, Platinum, Oxygen, Microfabrication, Testing and analysis, Liquids

Showing 5 of 9 publications
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