Dr. Yuansheng Ma
Engineer at
SPIE Involvement:
Author
Publications (15)

PROCEEDINGS ARTICLE | March 28, 2018
Proc. SPIE. 10588, Design-Process-Technology Co-optimization for Manufacturability XII
KEYWORDS: Data modeling, Calibration, Inspection, Finite element methods, Bridges, Photomasks, Optical proximity correction, Semiconducting wafers, Failure analysis, Optics manufacturing

SPIE Journal Paper | March 23, 2018
JM3 Vol. 17 Issue 01
KEYWORDS: Directed self assembly, Connectors, Global Positioning System, Curium, Model-based design, Detection and tracking algorithms, Calibration, Monte Carlo methods, Data modeling, Failure analysis

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Optical proximity correction, SRAF

PROCEEDINGS ARTICLE | March 30, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Logic, Optical lithography, Visualization, Etching, Metals, Error analysis, Manufacturing, Monte Carlo methods, Solids, Photomasks, Directed self assembly, Optical proximity correction, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 21, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Optical lithography, Detection and tracking algorithms, Calibration, Printing, Monte Carlo methods, Photomasks, Directed self assembly, Connectors, Optimization (mathematics), Model-based design, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 21, 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Optical lithography, Data modeling, Visualization, Polymers, Manufacturing, Inspection, Design for manufacturing, Photomasks, Directed self assembly, Epitaxy, Electronic design automation, Systems modeling

Showing 5 of 15 publications
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