Dr. Yubao Wang
Senior Research Associate at Brewer Science Inc
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Polymethylmethacrylate, Etching, Annealing, Resistance, Scanning electron microscopy, Photoresist materials, Directed self assembly, Plasma etching, Picosecond phenomena, System on a chip

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8685, Advanced Etch Technology for Nanopatterning II
KEYWORDS: Carbon, Lithography, Etching, Silicon, Resistance, Scanning electron microscopy, Photoresist materials, Reactive ion etching, Semiconducting wafers, System on a chip

Proceedings Article | 26 March 2013 Paper
Proc. SPIE. 8680, Alternative Lithographic Technologies V
KEYWORDS: Lithography, Optical lithography, Polymethylmethacrylate, Reflection, Etching, Photoresist materials, Directed self assembly, Critical dimension metrology, System on a chip, Polonium

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Metrology, Etching, Air contamination, Particles, Silicon, Coating, Reflectivity, Surface roughness, Semiconducting wafers, System on a chip

Proceedings Article | 16 March 2009 Paper
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Carbon, Lithography, Diffraction, Optical lithography, Etching, Ultraviolet radiation, Silicon, Reflectivity, Photoresist materials, Silicon carbide

Showing 5 of 11 publications
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