This work is dedicated to the study of fatigue effects upon femtosecond laser-induced damage of Ta<sub>2</sub>O<sub>5</sub>/HfO<sub>2</sub>/SiO<sub>2</sub> highreflective coatings irradiated by pulse train at 1Hz (65 fs, 800 nm). Upon on comparative measurements of different pulse numbers involving between 10 and 300 pulses, laser-induced damage threshold (LIDT) decreases and the multipulse LIDT decreased to the level of 70~75% of the single pulse LIDT. In addition, we found that the probability of damage performs an increasing trend with the number of pulse increases when the coating is irradiated with the same fluence. The evolution of LIDT and 100% damage probability threshold under multipulse irradiations revealed that fatigue effects were affected by both laser fluence and shot numbers. The deep defects play an important role in the multi-shot mode. A correlative theory model based on critical conduction band electron density is constructed to elucidate the experimental phenomena.
Since negative photoresist SU-8 has become a common material for multi-photon micro-lithology, it is necessary to study laser conditions adopted in lithology process. Optical transmittance of SU-8 was tested. According to Urbach optical-absorption theory and Gaussian laser lateral spatial intensity envelope, relationship between theory and actual polymerization size of SU-8 was shown. Experimentally, we investigated multi-photon polymerization threshold and laser-induced damage of SU-8 under femtosecond laser irradiation with the pulse width of 45 fs at 800 nm by 1-on-1 tests. The polymerization and damage threshold at 45 fs are 2.7 and 8.9 TW/cm<sup>2</sup>, respectively. Polymerization and damage morphologies are shown with high contrast and polymerization sizes are measured under SEM. Theoretical polymerization sizes versus laser fluence are calculated by laser-induce multi-photon polymerization size analysis (LMPSA), including Urbach optical-absorption theory and Gaussian laser lateral spatial intensity distribution. The calculated results show that diffusion exists in the femtosecond laser-induced polymerization.