Dr. Yue Dong
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 March 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Mathematical modeling, Device simulation, Reticles, Lithography, Control systems, Detection and tracking algorithms, Systems modeling, Servomechanisms, Amplifiers, Instrumentation engineering

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