To achieve a high accuracy of optical freeform surfaces, it is necessary to conduct a repetition of measurementcompensation.
Filtering is a key procedure in the loops to extract the actual form errors and then to generate
compensation path. Although spline filter is an efficient approach, it has poor robustness when the data contains outliers.
A modified spline filter is introduced in this study to enhance the robustness by a preprocessing procedure based on the
M-estimation theory. The cascaded approximating method is also applied to reduce the deviation to Gaussian filter in the
amplitude transmission characteristic. The 2D spline filter is also developed to process the 3D measured data of optical
freeform surfaces. The effectiveness of this newly proposed method is verified by the experiments.
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