Miss Yue Zhao
at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 17, 2005
Proc. SPIE. 5644, Optoelectronic Devices and Integration
KEYWORDS: Fabrication, Optical sensors, Microlens array, Polymers, Ultraviolet radiation, Silicon, Photoresist materials, Microlens, Charge-coupled devices, Polymeric sensors

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Etching, Ions, Silicon, Gases, Plasmas, Micro optics, Reactive ion etching, Semiconducting wafers, Anisotropic etching, Anisotropy

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top