Fabrication of Polymer microlens array based on UV-molding techniques is presented. UV-molding enables for the integration of polymer microlens array on top of arbitrary substrates like glass, silicon other polymeric films. In this technique, photoresist or glass mold is first fabricated by conventional photolithnic method and subsequently served as transparent replication tool. UV curable polymer resin is then coated on patterned or unpatterned substrates and a contact mask aligner is used to align substrates and replication mold tool and then make the mold immersed into the resin. Replication of polymer on substrates is achieved by UV photopolymerisation of the resin. Resin thickness and gap distance between mold and substrate are carefully controlled in order to obtain acceptable thickness of cured polymer base. The UV molding technique was used to molding of a polymer film carring microlens array on the surface of an experimental CCD imaging sensor chip in this paper to enhance its fill factor and sensitivity.
Anisotropic reactive ion etching of silicon has been widely used in fabrication of diffractive optical elements, waveguides and structures of Micro-Electro-Mechanical Systems (MEMS) in recent years. It is important to achieve minimal roughness on both horizontal surfaces and sidewalls in reactive ion etching (RIE) of silicon. Now reactive ion etching of silicon in an RF parallel plate system, using SF<sub>6</sub>/O<sub>2</sub>/CHF<sub>3</sub> plasmas, has been experimentally studied. Black silicon method (BSM) is a powerful tool that can be used to find the best conditions under which the anisotropic etching of silicon is optimized. In the process of etching silicon, SF<sub>6</sub> serves as the major reactive etching species on silicon, while O<sub>2</sub> is added to build the passivation layer on the sidewalls and surfaces to get anisotropic profiles and CHF3 to suppress the formation of passivation on horizontal surfaces in order to achieve smooth etch surfaces. BSM provides a convenient way to know the function of the gases adding into the RIE and to find how to adjust the proportion of the gas combination. Experimental parameters including the etching rate, selectivity, anisotropy, and self-bias voltage under different parameters have been examined through SEM and AFM. As a result, anisotropic etching conditions and the parameters corresponding to the minimal roughness on the surfaces were obtained.