Dr. Yueyu Wang
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 5 April 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Actuators, Data modeling, Sensors, Scanners, Distortion, Scanning probe microscopy, Statistical modeling, Systems modeling, Scanning tunneling microscopy, Scanning probe microscopes

Proceedings Article | 24 March 2006
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Actuators, Metrology, Sensors, Calibration, Scanners, Ceramics, Control systems, Distortion, Scanning probe microscopy, Position sensors

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