Diamagnetic levitation system is studied in detail in this paper. From top to bottom, the diamagnetic levitation system is composed of a lifting magnet, a top pyrolytic graphite sheet, a floating magnet and a bottom pyrolytic graphite sheet. The gravity of the floating magnet is balanced by the attractive force between the lifting magnet and the floating magnet. And the floating magnet is stably levitated between the top and bottom graphite sheets due to their diamagnetism. The force exerted on the floating magnet is analyzed through theoretical and numerical methods, and at the same time the equilibrium position is obtained. Totally 11 groups of magnets are studied by COMSOL, in which the accumulative error is eliminated to improve the accuracy of finite element analysis(FEA). Corresponding experiments are carried out to verify the numerical results, and the error of equilibrium position is less than 10%, which shows that the FEA is precise enough to simulate the diamagnetic system. Motion characteristic is studied for group 6, in which the lifting magnet is a φ3/16”× 1/8” cylinder. For the floating magnet, the horizontal force versus the eccentric displacement and the vertical force versus the vertical displacement are calculated by COMSOL respectively. In the magnetic potential well of the lifting magnet, the floating magnet returns to the vertical central axis automatically, and the frequencies of the vertical and horizontal movements are between 4 and 5 Hz. The frequencies of the two directional movements can be tuned by the magnetic parameters of the lifting and floating magnets and the structure dimensions of the system. The method used to analyze the diamagnetic system is proved effective to design the diamagnetic levitation structure. Because of the contactless levitation of the floating magnet based on diamagnetism, the system is sensitive to very small input. This diamagnetic levitation structure is potential in micro-actuators and sensors.
This paper presents a parallel dynamic passive valveless micropump, which consists of three layers-valve, diaphragm and electromagnetic coil. The valve is wetly etched in a silicon wafer, the diaphragm is a PDMS (polydimethyl siloxane) film spun on a silicon wafer with embedded permanent magnet posts, and the coil is electroplated on a silicon substrate. Under the actuation of the magnetic field of the coil, the flexible diaphragm can be displaced upwards and downwards. After analyzing magnetic and mechanical characteristic of the flexible membrane and direction-dependence of the diffuser, this paper designed a micropump. And the relative length (L/d) of the micropump’s diffuser is 4.An 7×7 array of permanent magnetic posts is embedded in the PDMS film. Two diaphragms work in an anti-step mode, which can relieve the liquid shock and increase the discharge of the micropump. ANSYS® and Matlab® are adopted to analyze the actuation effect of the coil and the flow characteristic of the micropump. Results show that when actuated under a 0.3A, 100Hz current ,the displacement of the diaphragm is more than 30μm, and the discharge of the micropump is about 6μL/s.
The prevailing micromachined vibratory gyroscope typically has a proof mass connected to the substrate by a mechanical suspension system, which makes it face a tough challenge to achieve tactical or inertial grade performance levels. With a levitated rotor as the proof mass, a micromachined rotational gyroscope will potentially have higher performance than vibratory gyroscope. Besides working as a moment rebalance dual-axis gyroscope, the micromachined rotational gyroscope based on a levitated rotor can simultaneously work as a force balance tri-axis accelerometer. Micromachined rotational gyroscope based on an electrostatically levitated silicon micromachined rotor has been notably developed. In this paper, factors in designing a rotational gyro/accelerometer based on an electrostatically levitated disc-like rotor, including gyroscopic action of micro rotor, methods of stable levitation, micro displacement detection and control, rotation drive and speed control, vacuum packaging and microfabrication, are comprehensively considered. Hence a design of rotational gyro/accelerometer with an electroforming nickel rotor employing low cost UV-LIGA technology is presented. In this design, a wheel-like flat rotor is proposed and its basic dimensions, diameter and thickness, are estimated according to the required loading capability. Finally, its micromachining methods based on UV-LIGA technology and assembly technology are discussed.