Dr. Yufeng Su
at Shanghai Jiao Tong Univ
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 19, 2015
Proc. SPIE. 9449, The International Conference on Photonics and Optical Engineering (icPOE 2014)
KEYWORDS: Sensors, Error analysis, Magnetism, Computer simulations, Numerical analysis, Finite element methods, Fermium, Atomic force microscope, Mechanical engineering, Motion analysis

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Actuators, Microfluidics, Silicon, Magnetism, Throat, Silicon films, Diffusers, Semiconducting wafers, Bromine, Electromagnetism

PROCEEDINGS ARTICLE | December 30, 2004
Proc. SPIE. 5641, MEMS/MOEMS Technologies and Applications II
KEYWORDS: Electrodes, Glasses, Nickel, Silicon, Capacitance, Micromachining, Gyroscopes, Structural design, Semiconducting wafers, Signal detection

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